MMA-EP1. Micromechanical accelerometer

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Force-balance-type transmitter.

Is based on the comb-type structure with lengthwise movement of inertial mass, and capacitive data pick-off; the accelerometer is manufactured using SOI technology.

APPLICATION

automotive industry – to improve traffic safety
robotics – to advance manipulator performance
medicine – to position surgical instruments
navigation and control systems of different mobile objects

Embedded temperature sensor; its readings can be used for temperature compensation
Programmed readjustment of parameters
Digital output signal, SPI-interface

Number of axes	1
Measurement range*	15g
Scale factor nonlinearity	<0.3 %
Scale factor instability	<1.5 %
Noise power density	<0.01 g/√Hz
Bandwidth *	100 Hz
Bias stability error (by Allan variance)	<0.001g
Overall dimensions	40.0×40.0×8.2 mm
Operating temperature range **	-55... +85 °C
Supply voltage, unipolar	+5 V
Readiness time	<0.5 s
Power consumption	<0.3 W
Output waveform	digital with SPI protocol

* parameter can be programmatically tuned according to the customer requirements

** embedded temperature sensor

Micromechanical sensors and units:

IMU. Strapdown inertial measurement unit

MMG-EP1. Micromechanical GYRO